1.

Conference Proceedings

Conference Proceedings
Hayden,J.D. ; McNelly,T.F. ; Perera,A.H. ; Pfiester,J.R. ; Subramanian,C.K. ; Thompson,M.A.
Pub. info.: Microelectronic Device and Multilevel Interconnection Technology II.  pp.148-163,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2875
2.

Conference Proceedings

Conference Proceedings
Gelatos,A.V. ; Nguyen,B.-Y. ; Perry,K.A. ; Marsh,R. ; Peschke,J. ; Filipiak,S. ; Travis,E.O. ; Thompson,M.A. ; Saaranen,T. ; Tobin,P.J. ; Mogab,C.J.
Pub. info.: Microelectronic Device and Multilevel Interconnection Technology II.  pp.346-357,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2875
3.

Conference Proceedings

Conference Proceedings
Nelson-Thomas,C. ; Kling,M.E. ; Thompson,M.A. ; Wang,R. ; Cave,N. ; Fu,C.-C.
Pub. info.: Optical Microlithography XIV.  4346  pp.464-470,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
4.

Conference Proceedings

Conference Proceedings
Wang,R. ; Grobman,W.D. ; Reich,A.J. ; Thompson,M.A.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.406-417,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562