1.

Conference Proceedings
Conference Proceedings
1. METHOD FOR EVALUATION AND OPTIMIZATION OF PARTICLE REMOVAL PROCESSES
Narayanswami, N. ; Ruether, P.A. ; Thomes, G. ; Weygand, J.F. ; Lee, N.-P. ; Christenson, K.K. ; Butterbaugh, J.W. ; Hoo, S.H. ; Liu, B.Y.H.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.469-476,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
2.

Conference Proceedings
Conference Proceedings
2. YIELD ENHANCEMENT BY CRYOKINETIC CLEANING
Butterbaugh, J.W. ; Loper, S. ; Thomes, G.
Pub. info.: Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium.  pp.335-342,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-36
3.

Conference Proceedings
Conference Proceedings
3. PYROLYTIC LASER DIRECT WRITING OF NICKEL OVER POLYIMIDES
Bezuk, S.J. ; Baseman, R.J. ; Kryzak, C. ; Warner, K. ; Thomes, G.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.75-82,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75