1.

Conference Proceedings
Conference Proceedings
1. Growth and Layer Characterization of SrTiO₃ by Atomic Layer Deposition using Sr(tBu₃Cp)₂ and Ti(OMe)₄
Mihaela Popovici ; Sven Van Elshocht ; Nicolas Menou ; Johan Swerts ; Dieter Pierreux ; Annelies Delabie ; Karl Opsomer ; Bert Brijs ; Gerrit Faelens ; Alexis Franquet ; Thierry Conard ; Jan Maes ; Dirk Wouters ; Jorge Kittl
Pub. info.: CMOS gate-stack scaling--materials, interfaces and reliability implications : symposium held April 14-16, 2009, San Francisco, California, U.S.A..  pp.131-136,  2009.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1155
2.

Conference Proceedings
Conference Proceedings
2. Composition Quantification of Microelectronics Multilayer Thin Films by EDX: Toward Small Scale Analysis
Thierry Conard ; Kai Arstila ; Thomas hantschel ; Alexis Franquet ; Wilfried Vandervorst ; Emma Vecchio ; Frank Bauer ; Simon Burgess
Pub. info.: Electron crystallography for materials research and quantitative characterization of nanostructured materials : symposium held April 14-16, 2009, San Francisco, California, U.S.A..  pp.191-196,  2009.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1184
3.

Conference Proceedings
Conference Proceedings
3. Backside Analysis of Ultra-Thin Film Stacks in Microelectronics Technology Using X-ray Photoelectron Spectroscopy
Thomas Hantschel ; Cindy Demeulemeester ; Arnaud Suderie ; Thomas Lacave ; Thierry Conard ; Wilfried Vandervorst
Pub. info.: Electron crystallography for materials research and quantitative characterization of nanostructured materials : symposium held April 14-16, 2009, San Francisco, California, U.S.A..  pp.185-190,  2009.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1184