Gupta, V. ; Theodoropoulos, C. ; Peck, J.D. ; Mountziaris, T.J.
Pub. info.:
Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing. pp.300-307, 1997. Pennington, NJ. Electrochemical Society
Theodoropoulos, C. ; Moffat, H. K. ; Mountziaris, T. J.
Pub. info.:
Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.155-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Gupta, V. ; Theodoropoulos, C. ; Peck, J. D. ; Mountziaris, T. J.
Pub. info.:
Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.161-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Ingle, N. K. ; Theodoropoulos, C. ; Mountziaris, T. J. ; Wexler, R. M. ; Smith, F. T. J.
Pub. info.:
Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.. pp.177-, 1994. Pittsburgh, PA. MRS - Materials Research Society
Pawlowski, R. P. ; Theodoropoulos, C. ; Mountziaris, T. J. ; Moffat, H. K. ; Han, J. ; Thrush, E. J.
Pub. info.:
New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A.. pp.159-, 2000. Warrendale, PA. MRS-Materials Research Society