1.

Conference Proceedings

Conference Proceedings
Gupta, V. ; Theodoropoulos, C. ; Peck, J.D. ; Mountziaris, T.J.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.300-307,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9
2.

Conference Proceedings

Conference Proceedings
Puwlosvski, R.P. ; Theodoropoulos, C. ; Salinger, A.G. ; Moffat, H.K. ; Mountziuris, T.J. ; Shadid, J.N. ; Thrush, E.J.
Pub. info.: CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition.  pp.675-682,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-13
3.

Conference Proceedings

Conference Proceedings
Theodoropoulos, C. ; Moffat, H. K. ; Mountziaris, T. J.
Pub. info.: Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A..  pp.155-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 490
4.

Conference Proceedings

Conference Proceedings
Gupta, V. ; Theodoropoulos, C. ; Peck, J. D. ; Mountziaris, T. J.
Pub. info.: Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A..  pp.161-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 490
5.

Conference Proceedings

Conference Proceedings
Ingle, N. K. ; Theodoropoulos, C. ; Mountziaris, T. J. ; Wexler, R. M. ; Smith, F. T. J.
Pub. info.: Gas-phase and surface chemistry in electronic materials processing : symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A..  pp.177-,  1994.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 334
6.

Conference Proceedings

Conference Proceedings
Pawlowski, R. P. ; Theodoropoulos, C. ; Mountziaris, T. J. ; Moffat, H. K. ; Han, J. ; Thrush, E. J.
Pub. info.: New methods, mechanisms and models of vapor deposition : symposium held April 24-26, 2000, San Francisco, California, U.S.A..  pp.159-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 616