1.

Conference Proceedings
Conference Proceedings
1. Development of a technique for rapid at-wavelength inspection of EUV mask blanks
Spector,S.J. ; Luo,P. ; Novembre,A.E. ; Ocola,L.E. ; White,D.L. ; Tennant,D.M. ; O.R.Wood ?
Pub. info.: Emerging lithographic technologies III : 15-17 March 1999, Santa Clara, California.  Part2  pp.606-614,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3676
2.

Conference Proceedings
Conference Proceedings
2. Characterization of the alignment system on a laboratory extreme ultraviolet lithography tool
Nguyen,K.B. ; Tichenor,D.A. ; Berger,K.W. ; Ray-Chaudhuri,A.K. ; Haney,S.J. ; Nissen,R.P. ; Perras,Y. ; Arling,R.W. ; Stulen,R.H. ; Fetter,L.A. ; Tennant,D.M. ; White,D.L. ; Wood,O.R.II
Pub. info.: Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI : 11-13 March 1996, Santa Clara, California.  pp.54-62,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2723
3.

Conference Proceedings
Conference Proceedings
3. Fabrication and commercialization of scalpel masks (Invited Paper)
Novenber,A.E. ; Peabody,M.L. ; Blakey,M.I. ; Farrow,R.C. ; Kasica,R.J. ; Liddle,J.A. ; Saunders,T.E. ; Tennant,D.M.
Pub. info.: Photomask and X-Ray Mask Technology V.  pp.350-357,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3412
4.

Conference Proceedings
Conference Proceedings
4. Patterning of membrane masks for profection e-baem lithography
Fetter,L.A. ; Biddick,C. ; Blakey,M.I. ; Liddle,A.J. ; Peabody,M.L. ; Novembre,A.E. ; Tennant,D.M.
Pub. info.: 16th Annual BACUS Symposium on Photomask Technology and Management.  pp.276-287,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2884
5.

Conference Proceedings
Conference Proceedings
5. Wavelength division multiplexed(WDM)electroabsorption modulated laser fabricated by selective area growth MOVPE techniques
Tanbun-Ek,T. ; Fang,W.-C.W. ; Bethea,C.G. ; Sciortino,P.F.,Jr. ; Sergent,A.M. ; Wisk,P. ; People,R. ; Chu,S.N.G. ; Pawelek,R. ; Tsang,W.T. ; Tennant,D.M. ; Feder,K. ; Koren,U.
Pub. info.: Optoelectronic Integrated Circuits.  pp.196-206,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3006
6.

Conference Proceedings
Conference Proceedings
6. Printing high-density patterns with dark-field 193-nm lithography
Wood Ⅱ,O.R. ; White,D.L. ; Tennant,D.M. ; Cirelli,R.A. ; Sweeney,J.R. ; Blakey,M.I. ; Griffith,J.E.
Pub. info.: Optical Microlithography XIV.  4346  pp.1470-1477,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
7.

Conference Proceedings
Conference Proceedings
7. Nanoscale coherent acoustic phonon imaging (Invited Paper) [6118-30]
Daly, B. C. ; Klein, J. ; Norris, T. B. ; Pau, S. ; Tennant,D.M. ; Taylor, J. A. ; Bower, J. E.
Pub. info.: Ultrafast Phenomena in Semiconductors and Nanostructure Materials X.  pp.61180U-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6118
8.

Conference Proceedings
Conference Proceedings
8. Yield,metrology,and inspection characteristics of SCALPEL masks
Peabody,M.L. ; Blakey,M.I. ; Farrow,R.C. ; Kasica,R.J. ; Liddle,J.A. ; Novembre,A.E. ; Saunders,T.E. ; Tennant,D.M. ; Windt,D.L.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.190-194,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236
9.

Conference Proceedings
Conference Proceedings
9. Rapid at-wavelength inspection of FUV mask blanks by photoresist transfer
Spector,S.J. ; White,D.L. ; Tennant,D.M. ; Luo,P. ; ll,O.R.Wood
Pub. info.: 18th Annual BACUS Symposium on Photomask Technology and Management.  pp.548-555,  1998.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3546