1.

Conference Proceedings
Conference Proceedings
1. DEFECTS IN SILICON CRYSTALS AND THEIR IMPACT ON TRENCH CAPACITOR DRAM DEVICE CHARACTERISTICS
Dornberger, E. ; Temmler, D. ; von Ammon, W.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.227-240,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
2.

Conference Proceedings
Conference Proceedings
2. DEFECTS IN SILICON CRYSTALS AND THEIR IMPACT ON TRENCH CAPACITOR DRAM DEVICE CHARACTERISTICS
Dornberger, E. ; Temmler, D. ; von Ammon, W.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.227-240,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
3.

Conference Proceedings
Conference Proceedings
3. Defects in silicon crystals and their impact on device characteristics
Dornberger, E. ; Temmler, D. ; von Ammon, W.
Pub. info.: Crystalline defects and contamination: their impact and control in device manufacturing III : DECON 2001 : proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany.  pp.35-50,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-29