1.

Conference Proceedings
Conference Proceedings
1. Growth and Characterization of Thin Wet Oxides Grown by Rapid Thermal Processing
Sharangpani, R. ; Das, J. ; Tay, S. P. ; Thakur, R. P. S. ; Yang, T. C. ; Saraswat, K. C.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.143-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525
2.

Conference Proceedings
Conference Proceedings
2. In Situ Real-Time Studies of Nickel Silicide Formation
Tinani, M. ; Irene, E. A. ; Hu, Y. Z. ; Tay, S. P.
Pub. info.: In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A..  pp.121-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 569
3.

Conference Proceedings
Conference Proceedings
3. Comparision of SiH4 and Si2H6 RTCVD Kinetics Using In Situ Spectroscopic Ellipsometry
Hu, Y. Z. ; Tay, S. P. ; Wasserman, Y. ; Zhao, C. Y. ; Irene, E. A.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.115-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470