1.

Conference Proceedings
Conference Proceedings
1. Si/Ge Ordered Interface:Structure and Formation Mechanism
Ikarashi,N. ; Akimoto,K. ; Oshiyama,A. ; Tatsumi,T.
Pub. info.: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.511-516,  1995.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 196-201
2.

Conference Proceedings
Conference Proceedings
2. Si selective epitaxial growth technology using UHV-CVD and its application to LSI fabrication (Invited Paper)
Shishiguchi,S. ; Yasunaga,T. ; Aoyama,T. ; Tatsumi,T. ; Saito,S.
Pub. info.: Microelectronic Device Technology : 1-2 October 1997, Austin, Texas.  pp.106-117,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3212
3.

Conference Proceedings
Conference Proceedings
3. Dry etching resistance of methacrylate polymers for ArF excimer laser lithography
Ohfuji,T. ; Endo,M. ; Takahashi,M. ; Naito,T. ; Tatsumi,T. ; Kuhara,K. ; Sasago,M.
Pub. info.: Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California.  Part 1  pp.595-600,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3333