1.

Conference Proceedings

Conference Proceedings
Cheng, Zhiyuan ; Currie, Matthew T. ; Leitz, Chris W. ; Taraschi, Gianni ; Lee, Minjoo L. ; Pitera, Arthur ; Hoyt, Judy L. ; Antoniadis, Dimitri A. ; Fitzgerald, Eugene A.
Pub. info.: Materials issues in novel si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A..  pp.21-26,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 686
2.

Conference Proceedings

Conference Proceedings
Lee, Minjoo L. ; Leitz, Christopher W. ; Cheng, Zhiyuan ; Pitera, Arthur J. ; Taraschi, Gianni ; Antoniadis, Dimitri A. ; Fitzgerald, Eugene A.
Pub. info.: Materials issues in novel si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A..  pp.39-46,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 686
3.

Conference Proceedings

Conference Proceedings
Taraschi, Gianni ; Pitera, Arthur J. ; McGill, Lisa M. ; Cheng, Zhi-Yuan ; Lee, Minjoo L. ; Langdo, Thomas A. ; Fitzgerald, Eugene A.
Pub. info.: Novel materials and processes for advances CMOS : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.105-110,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 745