1.
|
Conference Proceedings
|
Tanner,D.M. ; Peterson,K.A. ; Irwin,L.A. ; Tangyunyong,P. ; Miller,W.M. ; Eaton,W.P. ; Smith,N.F. ; Rodgers,M.S.
Pub. info.: |
Materials and Device Characterization in Micromachining. pp.215-226, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
3512 |
|
2.
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Conference Proceedings
|
Peterson,K.A. ; Tangyunyong,P. ; Pimentel,A.A.
Pub. info.: |
Materials and Device Characterization in Micromachining. pp.190-200, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
3512 |
|
3.
|
Conference Proceedings
|
Walraven,J.A. ; Soden,J.M. ; Tanner,D.M. ; Tangyunyong,P. ; Cole Jr.,E.I. ; Anderson,R.E. ; Irwin,L.W.
Pub. info.: |
MEMS Reliability for Critical Applications. pp.30-39, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4180 |
|