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38 results

Conference Proceedings

1. New concept photomask repeater with stitching exposure technique

Irie,N. ; Muramatsu,K. ; Ishii,Y. ; Magome,N. ; Umatate,T. ; Kyoh,S. ; Tanaka,S. ; Inoue,S. ; Higashikawa,I. ; Mori,I. ; Okumura,K.

Pub. info.:	20th Annual BACUS Symposium on Photomask Technology. 4186 pp.34-45, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4186

Conference Proceedings

2. Mechanical properties of SiB6 addition of carbon sintered body

Tanaka,S. ; Fukushima,N. ; Matsushita,J. ; Akatsu,T. ; Niihara,K. ; Yasuda,E.

Pub. info.:	Smart materials. 4234 pp.346-354, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4234

Conference Proceedings

3. Slope failure detection from temporal AVNIR images taken before and after the northwest Kagoshima-ken earthquake

Tanaka,S. ; Sugimura,T. ; Takatori,S. ; Komaki,Y.

Pub. info.:	Remote senging for earth science, ocean, and sea ice applications : 20-24 September 1999, Florence, Italy. pp.271-282, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3868

Conference Proceedings

4. Ultrahigh-repetition-rate ArF excimer laser with long pulse duration for 193-nm lithography

Kakizaki,K. ; Matsunaga,T. ; Sasaki,Y. ; Inoue,T. ; Tanaka,S. ; Tada,A. ; Taniguchi,H. ; Arai,M. ; Igarashi,T.

Pub. info.:	Optical Microlithography XIV. 4346 pp.1210-1218, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4346

Conference Proceedings

5. Pattern-transmitting CO2 laser using arbitrarily shaped coupling-hole mirror

Tanaka,S. ; Sato,H.

Pub. info.:	Optoelectronic Information Systems and Processing. 4513 pp.153-158, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4513

Conference Proceedings

6. Dye-doped organic polymer thin film waveguide laser

Ohmori,R. ; Tanaka,S. ; Watanabe,A. ; Hayakawa,S. ; Sato,H.

Pub. info.:	Optoelectronic Information Systems and Processing. 4513 pp.147-152, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4513

Conference Proceedings

7. Practical topography design for alternating phase-shifting mask

Tanaka,S. ; Nakamura,H. ; Kawano,K. ; Inoue,S.

Pub. info.:	Optical Microlithography IX. Part2 pp.473-484, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2726

Conference Proceedings

8. Application of Fourier Transform Method to Spectral Interferometry,

Tanaka,S. ; Ohtsuka,Y.

Pub. info.:	Optics for science and new technology : 17th Congress of the International Commission for Optics, August 19-23, 1996, Hotel Riviera(Yusong), Taejon Korea. Part2 pp.1118-1119, 1996. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	2778

Conference Proceedings

9. Shape-free coupling-hole-type CO2 laser with arbitrary beam pattern: application feasibility to micromachinery

Tanaka,S. ; Sato,H.

Pub. info.:	Optical engineering for sensing and nanotechnology (ICOSN 2001) : 6-8 June 2001, Yokohama, Japan. 4416 pp.474-477, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4416

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Conference Proceedings

10. Thermoelectric properties of SiB6-C composites

Fukushima,N. ; Gomi,T. ; Tanaka,S. ; Matsushita,J.

Pub. info.:	Smart materials. 4234 pp.355-363, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4234

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