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35 results

Conference Proceedings

1. Airborne microwave radiometer for AMSR and AMSE-E project

Imaoka,K. ; Shibata,A. ; Nakagawa,N. ; Nakajima,Y. ; Haijima,H. ; Tanaka,H. ; Imatani,T.

Pub. info.:	Microwave remote sensing of the atmosphere and environment II : 9-12 October 2000, Sendai, Japan. pp.303-309, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4152

Conference Proceedings

2. Chemical and lithographic aspects of organic deep-UV BARCs

Padmanaban,M. ; Kang,W.-B. ; Kimura,K. ; Nishiwaki,Y. ; Pawlowski,C. ; Tanaka,H.

Pub. info.:	Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California. Part 1 pp.206-218, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3333

Conference Proceedings

3. High-spectral-purity and high-durability kHz KrF excimer laser with advanced rf preionization discharge

Enami,T. ; Wakabayashi,O. ; Nishisaka,T. ; Suzuki,N. ; Nire,T. ; Mizoguchi,H. ; Nakarai,H. ; Tanaka,H. ; Ariga,T. ; Shio,K. ; Okamoto,T. ; Noudomi,R. ; Tomaru,H. ; Nakao,K.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.1031-1040, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

4. Sensitivity enhancement of quantum well infrared photodetectors with a pseudorandom optical coupler by confinement of internal multireflection

Nishino,H. ; Masalkar,P.J. ; Sakachi,Y. ; Matsukura,Y. ; Tanaka,H. ; Yamamoto,K. ; Miyamoto,Y. ; Fujii,T.

Pub. info.:	Infrared technology and applications XXV : 5-9 April 1999, Orlando, Florida. pp.574-583, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3698

Conference Proceedings

5. Simple detector pixel of dielectric bolometer mode and its device structure for an uncooled IR image sensor

Noda,M. ; Mukaigawa,T. ; Hashimoto,K. ; Kiyomoto,T. ; Xu,H. ; Kubo,R. ; Tanaka,H. ; Usuki,T. ; Okuyama,M.

Pub. info.:	Infrared technology and applications XXV : 5-9 April 1999, Orlando, Florida. pp.565-573, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3698

Conference Proceedings

6. Billion-level durable ArF excimer laser with highly stable energy

Wakabayashi,O. ; Enami,T. ; Ohta,T. ; Tanaka,H. ; Kubo,H. ; Suzuki,T. ; Terashima,K. ; Sumitani,A. ; Mizoguchi,H.

Pub. info.:	Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part2 pp.1058-1068, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3679

Conference Proceedings

7. Water-castable bottom antireflective coatings

Lu,P.-H. ; Mehtsun,S. ; Sagan,J.P. ; Dammel,R.R. ; McCulloch,I.A. ; Kang,M. ; Tanaka,H. ; Kimura,K.

Pub. info.:	Advances in resist technology and processing XV : 23-25 February 1998, Santa Clara, California. Part 2 pp.806-817, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3333

Conference Proceedings

8. Performance of a highly stable 2-kHz-operation KrF Laser

Enami,T. ; Nakano,M. ; Watanabe,T. ; Ohbo,A. ; Hori,T. ; Ito,T. ; Nishisaka,T. ; Sumitani,A. ; Wakabayashi,O. ; Mizoguchi,H. ; Nakarai,H. ; Hisanaga,N. ; Matsunaga,T. ; Tanaka,H. ; Sakanishi,S. ; Okamoto,T. ; Noudomi,R. ; Suzuki,T. ; Takabayashi,Y.

Pub. info.:	Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part2 pp.1076-1084, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3679

Conference Proceedings

9. Hollow light guide and optical fiber for UV laser transmission

Kubo,U. ; Hashishin,Y. ; Nakano,H. ; Tanaka,H.

Pub. info.:	Proceedings of biomedical systems and technologies II : 4-6 September 1997, San Remo, Italy. pp.75-80, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3199

10.

Conference Proceedings

10. Quantum well infrared photodetectors (QWIP) with selectively regrown N-GaAs plugs

Matsukura,Y. ; Nishino,H. ; Tanaka,H. ; Fujii,T.

Pub. info.:	Infrared technology and applications XXVII : 16-20 April 2001, Orlando, USA. pp.481-488, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4369

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Author: Tanaka,H.