Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.. pp.105-116, 1985. Pittsburgh, Pa.. Materials Research Society
Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.. pp.223-230, 1985. Pittsburgh, Pa.. Materials Research Society
Tan, T. Y. ; You, H. M. ; Yu, S. ; Goesele, U. M. ; Jager, W. ; Zypman, F. ; Tsu, R. ; Lee, S.-T
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Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.873-880, 1992. Pittsburgh, Pa.. Materials Research Society
Defects in electronic materials : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.605-612, 1988. Pittsburgh, Pa.. Materials Research Society
Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.99-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Semiconductor process and device performance modeling : symposium held December 2-3, 1997, Boston, Massachusetts, U.S.A.. pp.77-, 1998. Warrendale, Pa.. MRS - Materials Research Society