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15 results

Conference Proceedings

1. Optimization of DUV photolithography for sub-250-nm technology: contact patterning with attenuated phase-shift mask

Choo,L.-C. ; Tam,S.-C. ; Cheng,A. ; Ho,I.C.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.559-566, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

2. Phase-shifting interferometer for surface inspection

Tam,S.-C. ; Low,B.-Y. ; Chua,H.-C. ; Ho,A.T.-S. ; Neo,W.-P

Pub. info.:	Automatic inspection and novel instrumentation : 25-26 June 1997, Singapore. pp.118-124, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3185

Conference Proceedings

3. Intelligent control of Nd:YAG solid state laser

Zhao,G. ; Liu,J. ; Tam,S.-C. ; Xie,W. ; Liu,W. ; Wen,G. ; Gong,Z. ; Gu,J. ; Lam,Y.-L.

Pub. info.:	Solid state lasers IX : 25-26 January 2000, San Jose, California. pp.229-235, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3929

Conference Proceedings

4. Novel use of GaAs as a passive Q-switch as well as an output coupler for diode-pumped infrared solid state lasers

Gu,J. ; Tam,S.-C. ; Lam,Y.-L. ; Chen,Y. ; Kam,C.-H. ; Tan,W. ; Xie,W. ; Zhao,G. ; Yang,H.

Pub. info.:	Solid state lasers IX : 25-26 January 2000, San Jose, California. pp.222-228, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3929

Conference Proceedings

5. Theoretical analysis and simulation of a hybrid diode-pumped solid state laser

Yang,H. ; Liu,J. ; Xie,W. ; Tam,S.-C. ; Lam,Y.-L. ; Gu,J. ; Zhao,G.

Pub. info.:	Solid state lasers IX : 25-26 January 2000, San Jose, California. pp.66-73, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3929

Conference Proceedings

6. Model for fabricating close-coupling pumped microchip lasers

Liu,J.-G. ; Tam,S.-C. ; Lam,Y.-L. ; Yang,H.-R. ; Xie,W.-J. ; Shen,D.-Y.

Pub. info.:	Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore. pp.315-322, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4228

Conference Proceedings

7. Selectively deposited copper on laser-treated polyimide using electroless plating

Zhao,G. ; Phillips,H.M. ; Zheng,H. ; Tam,S.-C. ; Liu,W. ; Wen,G. ; Gong,Z. ; Lam,Y.-L.

Pub. info.:	Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA. pp.505-510, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3933

Conference Proceedings

8. Simple method to analyze thermal effects of high-power solid state lasers

Xie,W. ; Tam,S.-C. ; Lam,Y.-L. ; Yang,H. ; Gu,J. ; Zhao,G. ; Tan,W.

Pub. info.:	Solid state lasers IX : 25-26 January 2000, San Jose, California. pp.199-205, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3929

Conference Proceedings

9. Thermal analysis of high-power solid state laser with a Gaussian heat density deposition

Xie,W. ; Tam,S.-C. ; Yang,H. ; Gu,J. ; Zhao,G. ; Lam,Y.-L. ; Kam,C.-H.

Pub. info.:	Photonic Systems and Applications in Defense and Manufacturing. pp.396-403, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3898

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Conference Proceedings

10. Application of attenuated phase-shifting masks to sub-130-nm lithography

Koo,C.-K. ; Choo,L.-C. ; Lin,Q. ; Tan,S.-S. ; Lee,H.-J. ; Tam,S.-C. ; See,A.

Pub. info.:	Optical Microlithography XIV. 4346 pp.787-797, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4346

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Author: Tam,S.-C.