1.

Conference Proceedings
Conference Proceedings
1. High Performance, Highly Reliable Gate Oxide Formed with Rapid Thermal Oxidation In-Situ Steam Generation (ISSG) Technique
Ma, Y. ; Chen, Y.N. ; Brown, M.M ; Li, F. ; Chen, Y. ; Eng, J., Jr. ; Opila, R.L. ; Chabal, Y.J. ; Sapjeta, J. ; Muller, D.A. ; Xing, G.C. ; Trowbridge, T. ; Khau, M. ; Tam, N.
Pub. info.: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.179-186,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-9
2.

Conference Proceedings
Conference Proceedings
2. Remote Plasma Nitridation of In Situ Steam Generated (ISSG) Oxide
Al-Shareef, Husam N. ; Karamcheti, A. ; Luo, T.T. ; Brown, G.A. ; Watt, V.H.C. ; Jackson, M.D. ; Huff, H.R. ; Jallepally, R. ; Noble, D. ; Tam, N. ; Miner, G.
Pub. info.: Gate stack and silicide issues in silicon processing : symposium held April 25-27, 2000, San Francisco, California, U.S.A..  pp.C7.15-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 611