1.

Conference Proceedings
Conference Proceedings
1. Improvement of CD controllability in developer process
Kyoda, H. ; Okouchi, A. ; Takeguchi, H. ; Kim, H.W. ; Yamamoto, T. ; Yoshihara, K.
Pub. info.: Advances in Resist Technology and Processing XX.  2  pp.1353-1365,  2003.  Bellingham, CA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5039
2.

Conference Proceedings
Conference Proceedings
2. Behavior and control of resist dissolution in the development process
Takai, Y. ; Mulhall, J. ; Yoshihara, K. ; Kyoda, H. ; Takeguchi, H.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part Two  pp.929-935,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690