Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany. pp.282-286, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Uenishi, K. ; Seki, M. ; Kunimasa, T. ; Takatsugu, M. ; Kobayashi, K.F. ; Ikeda, T. ; Tsuboi, A.
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Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.57-62, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering