1.

Conference Proceedings
Conference Proceedings
1. A Study of the Deactivation of High Concentration, Laser Annealed Dopant Profiles in Silicon
Takamura, Yayoi ; Jain, Sameer ; Griffin, Peter B. ; Plummer, James D.
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669
2.

Conference Proceedings
Conference Proceedings
2. The Local Structure Of Antimony In High Dose Antimony Implants In Silicon By XAFS And Sims
Sahiner, M. Alper ; Novak, Steven W. ; Woicik, Joe C. ; Takamura, Yayoi ; Griffin, Peter B. ; Plummer, James D.
Pub. info.: Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A..  pp.121-128,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 717