1.

Conference Proceedings
Conference Proceedings
1. Image sensing method and defect detection algorithm for a 256-Mb and 1-Gb DRAM mask inspection system
Inoue,H. ; Okuda,K. ; Nomura,T. ; Tsuchiya,H. ; Tabata,M.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.462-469,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
2.

Conference Proceedings
Conference Proceedings
2. New die-to-database mask inspection system with i-line optics for 256-Mb and 1-Gb DRAMs
Tabata,M. ; Yamashita,K. ; Tsuchiya,H. ; Nomura,T. ; Inoue,H. ; Watanabe,T. ; Tojo,T. ; Yoshino,H.
Pub. info.: Photomask and X-ray mask technology IV : 17-18 April, 1997, Kawasaki, Japan.  pp.415-422,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3096
3.

Conference Proceedings
Conference Proceedings
3. High-resolution DUV inspection system for 150-nm generation masks
Tabata,M. ; Tsuchiya,H. ; Sanada,Y. ; Nishizaka,T. ; Hirazawa,H. ; Kobayashi,N. ; Nagai,H. ; Watanabe,T. ; Oohashi,K. ; Inoue,H. ; Nomura,T. ; Ono,A.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.138-146,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
4.

Conference Proceedings
Conference Proceedings
4. Positron Trapping Defects in Neutron-Irradiated Vitreous and Crystalline SiO2
Saneyasu,M. ; Hasegawa,M. ; Tang,Z. ; Tabata,M. ; Fujinami,M. ; Ito,Y. ; Yamaguchi,S.
Pub. info.: Positron annihilation, ICPA-11 : Proceedings of the 11th International Conference on Positron Annihilation, Kansas City, Missouri, USA, May 1997.  pp.460-462,  1997.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 255-257
5.

Conference Proceedings
Conference Proceedings
5. Positron and Positronium in Free Volume in Oxides:Silica Glass and Neutron-Irradiated Alumina
Hasegawa,M. ; Tabata,M. ; Miyamoto,T. ; Nagashima,Y. ; Hyodo,T. ; Fujinami,M. ; Yamaguchi,S.
Pub. info.: Positron annihilation : ICPA-10 : Proceedings of the 10th International Conference on Positron Annihilation, May 23-29, 1994, Beijing, China.  Part1  pp.269-278,  1995.  Aederlmannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 175-178
6.

Conference Proceedings
Conference Proceedings
6. Newly developed mask inspection system with DUV laser illumination
Oohashi,K. ; Inoue,H. ; Nomura,T. ; Ono,A. ; Tabata,M. ; Suzuki,H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.452-461,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066