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Deposition and Characterization of Perovskite Pb₁₋xLax(Zr,Ti)O₃ (PLZT) Thin Films by Combustion Chemical Vapor Deposition (CCVD)

Author(s):
  • Y.D. Jiang ( MicroCoating Technologies, Inc., Atlanta, GA )
  • T.J. Metzger ( MicroCoating Technologies, Inc., Atlanta, GA )
  • X. Xu ( MicroCoating Technologies, Inc., Atlanta, GA )
  • T.A. Polley ( MicroCoating Technologies, Inc., Atlanta, GA )
  • A.T. Hunt ( MicroCoating Technologies, Inc., Atlanta, GA )
Publication title:
45th annual technical conference proceedings, April 13-18, 2002, Lake Buena Vista, Florida
Title of ser.:
Annual Technical Conference of Society of Vacuum Coaters
Ser. no.:
45
Pub. Year:
2002
Page(from):
592
Page(to):
598
Pages:
7
Pub. info.:
Albuquerque, NM: Society of Vacuum Coaters
ISSN:
07375921
Language:
English
Call no.:
A63930/45
Type:
Conference Proceedings

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