1.

Conference Proceedings

Conference Proceedings
Y. Kagoyama ; M. Okamoto ; S. Harada ; R. Arai ; T. Umeda
Pub. info.: Silicon Carbide and Related Materials 2015 : [ICSCRM 2015] : selected, peer reviewed papers from the 16th International Conference on Silicon Carbide and Related Materials, October 4-9, 2015, Giardini Naxos, Italy.  pp.619-622,  2016.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 858
2.

Conference Proceedings

Conference Proceedings
T. Umeda ; H. Kawashima ; T. Miho ; K. Moriya
Pub. info.: Photomask technology 2007.  3  pp.67304Q-1-67304Q-11,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730
3.

Conference Proceedings

Conference Proceedings
T. Umeda ; M. Okamoto ; R. Arai ; Y. Satoh ; R. Kosugi
Pub. info.: Silicon carbide and related materials 2013 : selected, peer reviewed papers from the 15th International Conference on Silicon Carbide and Related Materials (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan.  pp.414-417,  2014.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 778-780
4.

Conference Proceedings

Conference Proceedings
T. Umeda ; N. Morishita ; T. Ohshima ; H. Itoh ; J. Isoya
Pub. info.: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006.  556-557  pp.453-456,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 556-557
5.

Conference Proceedings

Conference Proceedings
P. Carlsson ; N.T. Son ; T. Umeda ; J. Isoya ; E. Janzen
Pub. info.: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006.  556-557  pp.449-452,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 556-557
6.

Conference Proceedings

Conference Proceedings
H. Nagaum ; S. Suzuki ; T. Okane ; T. Umeda
Pub. info.: THERMEC 2006 : supplement to THERMEC 2006, 5th International conference on processing and manufacturing of advanced materials, July 4-8, 2006, Vancouver, Canad.  539-543  pp.380-385,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 539-543(1)
7.

Conference Proceedings

Conference Proceedings
A. Gali ; T. Umeda ; E. Janzen ; N. Morishita ; T. Ohshima
Pub. info.: Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain.  pp.361-364,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 615-617
8.

Conference Proceedings

Conference Proceedings
J. Isoya ; T. Umeda ; N. Mizuochi ; T. Ohshima
Pub. info.: Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain.  pp.353-356,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 615-617
9.

Conference Proceedings

Conference Proceedings
J. Isoya ; T. Umeda ; N. Mizuochi ; N.T. Son ; E. Janzén
Pub. info.: Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007.  pp.279-284,  2009.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 600-603
10.

Conference Proceedings

Conference Proceedings
T. Umeda ; T. Ishibashi ; A. Nakamura ; J. Ide ; M. Nagano
Pub. info.: Lithography Asia 2008.  2  pp.71402Z-1-71402Z-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140