1.

Conference Proceedings
Conference Proceedings
1. Characteristics analysis of polarization module on optical proximity effect
C. Park ; J. Hong ; K. Yang ; T. Theeuwes ; F. Gautier ; Y. Min ; A. Chen ; H. Yang ; D. Yim ; J. Kim
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings
Conference Proceedings
2. Study of iso-dense bias (IDB) sensitivity to laser spectral shape at the 45nm node
K. Yoshimochi ; T. Uchiyama ; T. Tamura ; T. Theeuwes ; R. Peeters ; H. van der Laan ; H. Bakker ; K. Morisaki ; T. Oga
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520