1.

Conference Proceedings

Conference Proceedings
T. Tezuka ; T. Irisawa ; E. Toyoda ; N. Sugiyama ; S. Takagi
Pub. info.: Advanced gate stack, source/drain and channel engineering for Si-based CMOS 4 : new materials, processes and equipment.  pp.263-274,  2008.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 13(1)
2.

Conference Proceedings

Conference Proceedings
S. Takagi ; T. Irisawa ; T. Tezuka ; S. Nakaharai ; T. Numata
Pub. info.: ULSI process integration 5.  pp.61-74,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(6)
3.

Conference Proceedings

Conference Proceedings
S. Takagi ; N. Taoka ; S. Nakaharai ; K. Ikeda ; T. Tezuka
Pub. info.: SiGe and Ge, materials, processing, and devices.  pp.823-829,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(7)
4.

Conference Proceedings

Conference Proceedings
N. Sugiyama ; T. Tezuka ; T. Irisawa ; K. Usuda ; Y. Moriyama
Pub. info.: SiGe and Ge, materials, processing, and devices.  pp.1015-1022,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 3(7)
5.

Conference Proceedings

Conference Proceedings
T. Irisawa ; T. Numata ; T. Tezuka ; K. Usuda ; N. Hirashita
Pub. info.: SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices.  pp.367-379,  2008.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(10)
6.

Conference Proceedings

Conference Proceedings
T. Baba ; T. Tezuka ; D. Ito ; T. Uchiyama ; H. Fujii
Pub. info.: Tenth International Symposium on Gas Flow and Chemical Lasers : 5-9 September 1994, Friedrichshafen, Germany.  pp.310-313,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2502
7.

Conference Proceedings

Conference Proceedings
R. Kotegawa ; D. Ito ; T. Tezuka ; T. Uchiyama ; H. Fujii
Pub. info.: Tenth International Symposium on Gas Flow and Chemical Lasers : 5-9 September 1994, Friedrichshafen, Germany.  pp.281-285,  1995.  Bellingham, WA.  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2502