1.

Conference Proceedings

Conference Proceedings
S. Takagi ; T. Irisawa ; T. Tezuka ; S. Nakaharai ; T. Numata
Pub. info.: ULSI process integration 5.  pp.61-74,  2007.  Pennington, N.J..  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 11(6)
2.

Conference Proceedings

Conference Proceedings
T. Irisawa ; T. Numata ; T. Tezuka ; K. Usuda ; N. Hirashita
Pub. info.: SiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices.  pp.367-379,  2008.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 16(10)