1.

Conference Proceedings
Conference Proceedings
1. Dynamics of the Vertical Distribution of CO2 and CO Concentrations over Western Siberia (1997-2003)
M.Yu. Arshinov ; B.D. Belam ; G. Inoue ; T. Machida ; M.V. Panchenko ; A.V. Fofonov
Pub. info.: Advances in the geological storage of carbon dioxide : international approaches to reduce anthropogenic greenhouse gas emissions.  pp.11-16,  2006.  Dordrecht.  Springer
Title of ser.: NATO science series. Series 4, Earth and environmental sciences
Ser. no.: 65
2.

Conference Proceedings
Conference Proceedings
2. Comparison of back side chrome focus monitor to focus self-metrology of an immersion scanner
K. D'have ; T. Machida ; D. Laidler ; S. Cheng
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
3.

Conference Proceedings
Conference Proceedings
3. Double patterning design split implementation and validation for the 32nm node
M. Drapeau ; V. Wiaux ; E. Hendrickx ; S. Verhaegen ; T. Machida
Pub. info.: Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521