1.

Conference Proceedings
Conference Proceedings
1. Recent Radio Monitoring of Microquasars with RATAN-600 Radio Telescope
S.A. Trushkin ; N.N. Bursov ; T. Kotani
Pub. info.: The 6th Integral Workshop : the obscured universe : 2-8 July 2006, Space Research Institute (IKI), Moscaw, Russian Federation.  pp.357-360,  2007.  Noordwijk.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 622
2.

Conference Proceedings
Conference Proceedings
2. Mask quality assurance in cleaning for haze elimination using flexible mask specifications
K. Otsubo ; S. Yamaguchi ; Y. Arisawa ; H. Mukai ; T. Kotani ; H. Mashita ; H. Hashimoto ; T. Kamo ; T. Tsutsui ; O. Ikenaga
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607
3.

Conference Proceedings
Conference Proceedings
3. Robust PPC and DFM methodology for exposure tool variations
T. Kotani ; F. Nakajima ; H. Mashita ; K. Sato ; S. Tanaka
Pub. info.: Optical Microlithography XXI.  1  pp.69241F-1-69241F-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6924
4.

Conference Proceedings
Conference Proceedings
4. Tool-induced hotspot fixing frow for high volume products
H. Mashita ; T. Kotani ; F. Nakajima ; H. Mukai ; K. Sato
Pub. info.: Photomask and next-generation lithography mask technology XV.  2  pp.70283I-1-70283I-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7028
5.

Conference Proceedings
Conference Proceedings
5. The FIRST project: a single-mode fiber-based very high-dynamic range diffraction-limited imaging instrument at visible to near-infrared wavelengths
T. Kotani ; G. Perrin ; S. Lacour ; E. Thiébaut ; J. Woillez
Pub. info.: Ground-based and airborne instrumentation for astronomy II.  1  pp.70141P-1-70141P-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7014
6.

Conference Proceedings
Conference Proceedings
6. Accuracy of mask pattern contour extraction with fine-pixel SEM images
S. Yamaguchi ; E. Yamanaka ; H. Mukai ; T. Kotani ; H. Mashita
Pub. info.: Photomask technology 2007.  2  pp.673036-1-673036-12,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730
7.

Conference Proceedings
Conference Proceedings
7. Process window aware layout optimization using hot spot fixing system
S. Kobayashi ; S. Kyoh ; T. Kotani ; S. Inoue
Pub. info.: Design for manufacturability through design-process integration : 28 February-2 March 2007, San Jose, California, USA.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6521
8.

Conference Proceedings
Conference Proceedings
8. Virtual wavefront compensation and speckle reduction in coronagraph by unbalanced nulling interferometer (UNI) and phase and amplitude correction (PAC)
J. Nishikawa ; K. Yokochi ; L. Abe ; N. Murakami ; T. Kotani
Pub. info.: Space telescopes and instrumentation 2008 : optical, infrared, and millimeter : 23-28 June 2008, Marseille, France.  1  pp.70102A-1-70102A-5,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7010