1.

Conference Proceedings
Conference Proceedings
1. Integration of a new alignment sensor for advanced technology nodes
P. Hinnen ; J. Depre ; S. Tanaka ; S. Lim ; O. Brioso ; M. Shahrjerdy ; K. Ishigo ; T. Kono ; T. Higashiki
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings
Conference Proceedings
2. Virtual lithography system to improve the productivity of high-mix low-volume production
K. Yoshida ; T. Sato ; T. Kono ; E. Yamanaka ; M. Kariya ; A. Inoue ; S. Mimotogi
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607
3.

Conference Proceedings
Conference Proceedings
3. High performance n-type FETs based on heterocyclic ring systems with trifluoromethylphenyl groups
Y. Yamashita ; S. Shimono ; T. Kono ; D. Kumaki ; J. Nishida
Pub. info.: Organic field-effect transistors VI : 26-28 August 2007, San Diego, California, USA.  pp.66580N-1-66580N-8,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6658