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Evaluation of Nb(Si)N as Metal Gate Material

Author(s):
N. Van Hoornick
H. De Witte
T. Hitters
C. Zhao
T. Canard
H. Huatori
J. Swerts
T. Schram
J. Maes
S. De Gendt
M. Heyns
6 more
Publication title:
Physics and technology of high-k gate dielectrics III
Title of ser.:
ECS transactions
Ser. no.:
1(5)
Pub. Year:
2006
Page(from):
495
Page(to):
506
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
19385862
ISBN:
9781566774444 [1566774446]
Language:
English
Call no.:
E23400/1-5
Type:
Conference Proceedings

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