1.

Conference Proceedings
Conference Proceedings
1. Integration of a new alignment sensor for advanced technology nodes
P. Hinnen ; J. Depre ; S. Tanaka ; S. Lim ; O. Brioso ; M. Shahrjerdy ; K. Ishigo ; T. Kono ; T. Higashiki
Pub. info.: Optical microlithography XX.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6520
2.

Conference Proceedings
Conference Proceedings
2. Aberration budget in extreme ultraviolet lithography
Y. Nakajima ; T. Sato ; R. lnanami ; T. Nakasugi ; T. Higashiki
Pub. info.: Emerging lithographic technologies XII.  1  pp.69211A-1-69211A-10,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6921
3.

Conference Proceedings
Conference Proceedings
3. A cost model comparing image qualification and direct mask inspection
K. Bhattacharyya ; V. Hazari ; D. Sutherland ; T. Higashiki
Pub. info.: EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6533