Gupta, P. ; Kahng, A. ; Kim, Y. ; Shah, S. ; Sylvester, D.
Pub. info.:
Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61560U-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61560A-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Gupta, P. ; Kahng, A. B. ; Kim, Y. ; Sylvester, D.
Pub. info.:
Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA. pp.61560B-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Design and process integration for microelectronic manufacturing III : 3-4 March 2005, San Jose, California, USA. pp.189-197, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Gupta, P. ; Kahng, A.B. ; Sylvester, D. ; Yang, J.
Pub. info.:
Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA. pp.123-133, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering