1.

Conference Proceedings
Conference Proceedings
1. The Influence of the AC Component of the Plasma Potential on the Measurements of the Ion Flux
Swart, L. ; Verdonck, P.
Pub. info.: Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium.  pp.351-356,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-03
2.

Conference Proceedings
Conference Proceedings
2. Determination of the Ion Density and Electron Temperature Using a Planar Electrostatic Probe
Swart, L. ; Verdonck, P.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.254-262,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08
3.

Conference Proceedings
Conference Proceedings
3. Study of Power Balance in Electronegative Capacitively Coupled Plasmas
Swart, L. ; Verdonck, P. ; Moshkalyov, S.A.
Pub. info.: Microelectronics technology and devices : SBMICRO 2003 : proceedings of the eighteenth international symposium.  pp.302-310,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-9