1.

Conference Proceedings
Conference Proceedings
1. Silicon Oxynitride Gate-Dielectric Made by ECR Plasma Oxynitridation
Manera, G. A. ; Diniz, J. A. ; Moshkalyov, S. A. ; Lujan, G. S. ; Doi, I. ; Swart, J. W.
Pub. info.: Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium.  pp.253-258,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-03
2.

Conference Proceedings
Conference Proceedings
2. Study of Carbon Nanotubes Growth by Atmospheric Pressure Chemical Vapor Deposition
Verissimo, C. ; Moshkalyov, S. A. ; Ramos, A. C. S. ; Goncalves, J. L. ; Leon, J. ; Swart, J. W.
Pub. info.: Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium.  pp.163-168,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-03
3.

Conference Proceedings
Conference Proceedings
3. Selective Etching of Polycrystalline Silicon in a Hexode Type Plasma Etcher
Vieira, R. ; Martarello, V. ; Moshkalyov, S. A. ; Diniz, J. A. ; Swart, J. W.
Pub. info.: Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium.  pp.363-368,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-03
4.

Conference Proceedings
Conference Proceedings
4. Use of a Langmuir Probe for ECR Plasma Characterization
Daltrini, A. M. ; Moshkalyov, S. A. ; Ramos, A. C. S. ; Swart, J. W.
Pub. info.: Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium.  pp.375-380,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-03
5.

Conference Proceedings
Conference Proceedings
5. Characteristics of Polycrystalline Si1-xGex Alloy Deposited in a Vertical LPCVD System
Teixeira, R. C. ; Doi, I. ; Diniz, J. A. ; Swart, J. W. ; Zakia, M. B. P. ; dos Santos Filho, S. G.
Pub. info.: Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium.  pp.307-312,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-03
6.

Conference Proceedings
Conference Proceedings
6. Electrical Characterization of Thin Gate Oxynitride Obtained by N+ Implantation into Polysilicon/ Thermal Oxide/ Silicon Structure
Toquetti, L. Z. ; dos Santos Filho, S. G. ; Diniz, J. A. ; Swart, J. W.
Pub. info.: Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium.  pp.331-338,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-03
7.

Conference Proceedings
Conference Proceedings
7. Control of Micron and Submicron Feature Dimensions in 2um Resolution Photolithographic System for MOS and MEMS Applications
Fioravante, N. P. Jr. ; Manera, L. T. ; Moshkalyov, S. A. ; Diniz, J. A. ; Tatsch, P. J. ; Grados, H. R. J. ; Doi, I. ; Swart, J. W.
Pub. info.: Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium.  pp.369-374,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-03
8.

Conference Proceedings
Conference Proceedings
8. Formation of Nickel Silicides onto As-Doped Silicon Using a Thin Pt/Pd Interlayer
Reis, R. W. ; dos Santos Filho, S. G. ; Doi, I. ; Swart, J. W.
Pub. info.: Microelectronics technology and devices : SBMICRO 2004 : proceedings of the nineteenth international symposium.  pp.357-362,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-03
9.

Conference Proceedings
Conference Proceedings
9. Growth of Carbon Nanostructures by Thermal Chemical Vapor Deposition via Metal Catalysis
Verissimo, C. ; Moshkalyov, S. A. ; Ramos, A. C. S. ; Goncalves, J. L. ; Swart, J. W.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.311-320,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08
10.

Conference Proceedings
Conference Proceedings
10. Characterization and Performance Evaluation of an APS Pixel in a Standard 2 um CMOS Technology
Mestanza, S. N. M. ; Rodriguez, E. ; Jimenez, H. G. ; Diniz, J. A. ; Doi, I. ; Swart, J. W.
Pub. info.: Microelectronics technology and devices : SBMICRO 2005 : proceedings of the twentieth international symposium.  pp.32-38,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-08