1.

Conference Proceedings
Conference Proceedings
1. Growth and Layer Characterization of SrTiO₃ by Atomic Layer Deposition using Sr(tBu₃Cp)₂ and Ti(OMe)₄
Mihaela Popovici ; Sven Van Elshocht ; Nicolas Menou ; Johan Swerts ; Dieter Pierreux ; Annelies Delabie ; Karl Opsomer ; Bert Brijs ; Gerrit Faelens ; Alexis Franquet ; Thierry Conard ; Jan Maes ; Dirk Wouters ; Jorge Kittl
Pub. info.: CMOS gate-stack scaling--materials, interfaces and reliability implications : symposium held April 14-16, 2009, San Francisco, California, U.S.A..  pp.131-136,  2009.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1155
2.

Conference Proceedings
Conference Proceedings
2. A CMOS Compatible Carbon Nanotube Growth Approach
Daire Cott ; Masahito Sugiura ; Nicolo Chiodarelli ; Kai Arstila ; Philipe M. Vereecken ; Bart Vereecke ; Sven Van Elshocht ; Stefan De Gendt
Pub. info.: Fundamentals of low-dimensional carbon nanomaterials : symposium held November 29-December 3, Boston, Massachusetts, U.S.A..  pp.69-78,  2011.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1284