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62 results

Conference Proceedings

1. High-pressure pulsed COIL assisted with an instantaneous production of atomic iodine

Suzuki,K. ; Minoshima,K. ; Sugimoto,D. ; Tei,K. ; Endo,M. ; Uchiyama,T. ; Nanri,K. ; Takeda,S. ; Fujioka,T.

Pub. info.:	XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference : 18-22 September 2000. pp.124-127, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4184

Conference Proceedings

2. Global theree-dimensional simulation and radiative forcing of various aerosol species with GCM

Takemura,T. ; Okamoto,H. ; Numaguti,A. ; Suzuki,K. ; Higurashi,A. ; Nakajima,T.

Pub. info.:	Optical remote sensing of the atmosphere and clouds II : 9-12 October 2000, Sendai, Japan. pp.249-257, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4150

Conference Proceedings

3. Effect of aerosols on cloud field with satellite-derived and GCM simulation

Suzuki,K. ; Nakajima,T. ; Numaguti,A. ; Takemura,T. ; Kawamoto,K. ; Higurashi,A.

Pub. info.:	Optical remote sensing of the atmosphere and clouds II : 9-12 October 2000, Sendai, Japan. pp.349-356, 2000. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4150

Conference Proceedings

4. Overlay and critical dimension control in 100-nm ULSI processes using TaBN x-ray masks and the XRA x-ray stepper

Fujii,K. ; Tanaka,Y. ; Iwanoto,T. ; Tsuboi,S. ; Sumitani,H. ; Taguchi,T. ; Suzuki,K. ; Matsui,Y.

Pub. info.:	Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA. pp.155-163, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4343

Conference Proceedings

5. Production x-ray lithography stepper for 100-nm device fabrication

Li,X. ; Miyatake,T. ; Hirose,S. ; Hirose,M. ; Fujii,K. ; Suzuki,K.

Pub. info.:	Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA. pp.164-175, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4343

Conference Proceedings

6. Nikon EB Stepper: the latest development status

Suzuki,K. ; Fujiwara,T. ; Hada,K. ; Hirayanagi,N. ; Kawata,S. ; Morita,K. ; Okamoto,K. ; Okino,T. ; Shimizu,S. ; Yahiro,T. ; Yamamoto,H.

Pub. info.:	Emerging lithographic technologies V : 27 February-1 March, 2001, Santa Clara, [California], USA. pp.80-87, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4343

Conference Proceedings

7. Detection of metal fatigue by laser-instituted thermal vibration

Mori,A. ; Iwasa,S. ; Suzuki,K.

Pub. info.:	Engineering thin films with ion beams, nanoscale diagnostics, and molecular manufacturing : 30-31 July 2001, San Diego, USA. pp.171-178, 2001. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4468

Conference Proceedings

8. Formation of optical microlens by laser polymerization method

Suzuki,K.

Pub. info.:	Gradient-index, miniature, and diffractive optical systems II : 2-3 August 2001, San Diego, USA. pp.181-189, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4437

Conference Proceedings

9. Correlation between power density fluctuation and grain size distribution of laser-annealed polycrystalline silicon

Suzuki,K. ; Saitou,M. ; Takahashi,M. ; Hayashi,N. ; Terabayashi,T.

Pub. info.:	Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California. pp.310-319, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3618

10.

Conference Proceedings

10. Transient temperature measurement of amorphous silicon thin films during excimer laser annealing

Moon,S. ; Lee,M. ; Hatano,M. ; Suzuki,K. ; Grigoropoulos,C.P.

Pub. info.:	Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California. pp.302-309, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3618

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