1.
Conference Proceedings |
1. Footing reduction of positive deep-UV photoresists on plasma-enhanced ARL (PEARL) SiON substrates
Joesten,L.A. ; Moynihan,M.L. ; Lindsay,T.K. ; Reilly,M. ; Konjuh,K. ; Mordo,D. ; MacWilliams,K.P. ; Sundararajan,S.
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2.
Technical Paper |
Aekbote,K. ; Sundararajan,S. ; Chou,C.C. ; Lim,G.G. ; Prater,J.A.
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3.
Technical Paper |
Lim,G.G. ; Chou,C.C. ; Sundararajan,S. ; Upmeyer,S.J. ; Celentino,M.F. ; Morgowicz,M.V.
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4.
Technical Paper |
Sundararajan,S. ; Aekbote,K. ; Chou,C.C. ; Lim,G.G. ; Chickola,J. ; Walker,L.A.
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5.
Technical Paper |
Sundararajan,S. ; Chou,C.C. ; Lim,G.G. ; Prater,J.A. ; Clements,R.R.
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