1.

Conference Proceedings
Conference Proceedings
1. Evaluation on Stress and Optical Property of Thin Films Used in Optical MEMS Device
Sun, Lianchao ; Hou, Ping
Pub. info.: Thin films : stresses and mechanical properties X : symposium held December 1-5, 2003, Boston, Massachusetts, U.S.A..  pp.479-484,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 795
2.

Conference Proceedings
Conference Proceedings
2. Precise Characterization of Silicon on Insulator (SOI) and Strained Silicon on Si1-xGex on Insulator (SSOI) Stacks With Spectroscopic Ellipsometry
Sun, Lianchao ; Fouere, Jean-Claude ; Defranoux, Christophe ; Heinrich, Patrice ; Reis, Christine Dos ; Emeraud, Thierry ; Piel, Jean-Philippe ; Stehle, Jean-Louis
Pub. info.: Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A..  pp.103-108,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 786