1.

Conference Proceedings

Conference Proceedings
Itakura, Y. ; Kawasa, Y. ; Wakabayashi, O. ; Moriya, M. ; Nagai, S. ; Sumitani, A. ; Hagiwara, T. ; Ishimaru, T. ; Tsuji, S. ; Fujii, K. ; Wakamiya, W.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.587-598,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings

Conference Proceedings
Hori, T. ; Yabu, T. ; Ishihara, T. ; Watanabe, T. ; Wakabayashi, O. ; Sumitani, A. ; Kakizaki, K. ; Mizoguchi, H.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1285-1292,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
3.

Conference Proceedings

Conference Proceedings
Itakura, Y. ; Kawasa, Y. ; Wakabayashi, O. ; Moriya, M. ; Nagai, S. ; Sumitani, A. ; Hagiwara, T. ; Ishimaru, T. ; Tsuji, S. ; Fujii, K. ; Wakamiya, W.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1269-1278,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
4.

Technical Paper

Technical Paper
Rudd, B.W. ; Stokes, W. ; Horikawa, K. ; Sumitani, A. ; Torobu, O.
Pub. info.: 2005 SAE Noise and Vibration Conference and Exhibition : technical paper.  2005.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 2005
5.

Conference Proceedings

Conference Proceedings
Mizoguchi, H. ; Endo, A. ; Arigo, T. ; Miura, T. ; Hoshino, H. ; Ueno, Y. ; Nakano, M. ; Komori, H. ; Sumitani, A. ; Abe, T. ; Suganuma, T. ; Soumagne, G. ; Someya, H. ; Takabayashi, Y. ; Toyoda, K.
Pub. info.: Emerging Lithographic Technologies X.  pp.61510S-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6151
6.

Conference Proceedings

Conference Proceedings
Saito, T. ; Suzuki, T. ; Yoshino, M. ; Wakabayashi, O. ; Matsunaga, T. ; Fujimoto, J. ; Kakizaki, K. ; Yamazaki, T. ; Inoue, T. ; Terashima, K. ; Enami, T. ; Inoue, H. ; Sumitani, A. ; Tomaru, H. ; Mizoguchi, H.
Pub. info.: Optical Microlithography XVI.  Part Three  pp.1704-1711,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040
7.

Conference Proceedings

Conference Proceedings
Fukuda, Y. ; Takeuchi, S. ; Aoki, T. ; Nagasaka, H. ; Owa, S. ; Yoshida, F. ; Kawasa, Y. ; Egawa, K. ; Watanabe, T. ; Uchino, I. ; Sumitani, A. ; Nakao, K.
Pub. info.: Optical Microlithography XV.  Part One  pp.734-745,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
8.

Conference Proceedings

Conference Proceedings
Sumitani, A. ; Itakura, Y. ; Yoshida, F. ; Kawasa, Y. ; Zhang, J. ; Kanda, N. ; Itani, T.
Pub. info.: Optical Microlithography XV.  Part Two  pp.1686-1695,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
9.

Conference Proceedings

Conference Proceedings
Wakabayashi, O. ; Ariga, T. ; Kumazaki, T. ; Sasano, K. ; Watanabe, T. ; Yabu, T. ; Hori, T. ; Kakizaki, K. ; Sumitani, A. ; Mizoguchi, H.
Pub. info.: Optical Microlithography XVII.  pp.1772-1780,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
10.

Conference Proceedings

Conference Proceedings
Kakizaki, K. ; Fujimoto, J. ; Yamazaki, T. ; Suzuki, T. ; Matsunaga, T. ; Kawasuji, Y. ; Watanabe, Y. ; Kaminishi, M. ; Inoue, T. ; Mizoguchi, H. ; Kumazaki, T. ; Ariga, T. ; Watanabe, T. ; Yabu, T. ; Sasano, K. ; Hori, T. ; Wakabayashi, O. ; Sumitani, A.
Pub. info.: Optical Microlithography XVII.  pp.1805-1814,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377