1.

Conference Proceedings

Conference Proceedings
Dixson,R. ; Schneir,J. ; McWaid,T.H. ; Sullivan,N.T. ; Tsai,V.W. ; Zaidi,S.H. ; Brueck,S.R.J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.589-607,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725
2.

Conference Proceedings

Conference Proceedings
Dixson,R. ; Sullivan,N.T. ; Schneir,J. ; McWaid,T.H. ; Tsai,V.W. ; Prochazka,J.J. ; Young,M.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography X.  pp.572-588,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2725
3.

Conference Proceedings

Conference Proceedings
Fritze,M. ; Tyrrell,B. ; Astolfi,D.K. ; Davis,P. ; Wheeler,B. ; Mallen,R. ; Jarmolowicz,J. ; Cann,S.G. ; Chan,D.Y. ; Rhyins,P.D. ; Mastovich,M.E. ; Sullivan,N.T. ; Brandom,R. ; Carney,C. ; Fritze,M. ; Blachowicz,B.A.
Pub. info.: Metrology, inspection, and process control for microlithography XV.  4344  pp.334-343,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344
4.

Conference Proceedings

Conference Proceedings
Ko,Y.-U. ; Joy,D.C. ; Sullivan,N.T. ; Mastovich,M.E.
Pub. info.: Metrology, inspection, and process control for microlithography XV.  4344  pp.37-45,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344
5.

Conference Proceedings

Conference Proceedings
Askary,F. ; Sullivan,N.T.
Pub. info.: Metrology, inspection, and process control for microlithography XV.  4344  pp.815-826,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344
6.

Conference Proceedings

Conference Proceedings
Fritze,M. ; Burns,J.M. ; Wyatt,P.W. ; Astolfi,D.K. ; Forte,T. ; Yost,D. ; Davis,P. ; Curtis,A.V. ; Preble,D.M. ; Cann,S.G. ; Denault,S. ; Liu,H.-Y. ; Shaw,J.C. ; Sullivan,N.T. ; Mastovich,M.E.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.388-407,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
7.

Conference Proceedings

Conference Proceedings
Allgair,J. ; Archie,C.N. ; Banke,W. ; Bogardus,H. ; Griffith,J.E. ; Marchman,H.M. ; Postek,M.T. ; Saraf,L.H. ; Schlesinger,J.E. ; Singh,B. ; Sullivan,N.T. ; Trimble,L.E. ; Vladar,A.E. ; Yanof,A.W.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.138-150,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
8.

Conference Proceedings

Conference Proceedings
Erickson,D. ; Sullivan,N.T. ; Elliott,R.C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XI.  pp.93-100,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3050
9.

Conference Proceedings

Conference Proceedings
Davidson,M.P. ; Sullivan,N.T.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XI.  pp.226-242,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3050
10.

Conference Proceedings

Conference Proceedings
Askary,F. ; Sullivan,N.T.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.546-554,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998