1.

Conference Proceedings

Conference Proceedings
Deura,M. ; Yamaguchi,S. ; Sugii,T.
Pub. info.: Microelectronic device technology II : 23-24 September, 1998, Santa Clara, California.  pp.292-300,  1998.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3506
2.

Conference Proceedings

Conference Proceedings
Sugii,T. ; Tanaka,T. ; Horie,H. ; Suzuki,K.
Pub. info.: Microelectronic Device and Multilevel Interconnection Technology.  pp.74-82,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2636