1.

Conference Proceedings
Conference Proceedings
1. EVALUATION OF PN JUNCTION LEAKAGE CURRENT IN VARIOUS IG PROCESSED Si WAFERS
Abe, H. ; Murakami, Y. ; Koya, H. ; Suzuki, I. ; Suga, H.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.997-1007,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
2.

Conference Proceedings
Conference Proceedings
2. INVESTIGATION OF METAL INDUCED SURFACE DEFECTS IN CZOCHRALSKI Si FOLLOWING RAPID THERMAL PROCESSING BY THERMAL WAVE MODULATED REFLECTANCE METHOD
Hahn, S. ; Smith, W. L. ; Suga, H. ; Park, J. G. ; Lim, C. S. ; Kwak, Y.-S. ; Meinecke, R. ; Kola, R. R. ; Rozgonyi, G. A. ; Kwack, K. D.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.81-88,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224