1.

Conference Proceedings
Conference Proceedings
1. Nanocavity Structures produced by ion implantation into silicon for semiconductor applications
Hurley, R. E. ; Gamble, H. S. ; Suder, S.
Pub. info.: Nanostructured and advanced materials for applications in sensor, optoelectronic and photovoltaic technology.  pp.299-309,  2006.  Dordrecht.  Springer
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 204
2.

Conference Proceedings
Conference Proceedings
2. Fabrication of Sub-micron Active Layer SSOI Substrates using Ion Splitting And Wafer Bonding Technologies
Ruddell, F. ; Bain, M. ; Suder, S. ; Hurley, R.E. ; Armstrong, B.M. ; Fusco, V.F. ; Gamble, H.S.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.25-30,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-19
3.

Conference Proceedings
Conference Proceedings
3. Fabrication of sub-micron active layer SSOI substrates using ion splitting and wafer bonding technologies
Ruddell, F.H. ; Rain, M.F. ; Suder, S. ; Hurley, R.E. ; Armstrong, R.M. ; Fusco, V.F. ; Gamble, H.S.
Pub. info.: Silicon-on-insulator technology and devices XI : proceedings of the international symposium.  pp.57-62,  2003.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-5