1.

Conference Proceedings

Conference Proceedings
Wang,Y. ; Su,B. ; Huang,X. ; Wang,Q.L. ; An,C.W. ; Fan,Y.C. ; Lu,D.S.
Pub. info.: Laser processing of materials and industrial applications II : 16-19 September 1998, Beijing, China.  pp.76-79,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3550
2.

Conference Proceedings

Conference Proceedings
Campbell,R.L. ; Su,B. ; Seregely,T.L. ; Wallace,S. ; Schantz,F.H.
Pub. info.: Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK.  4405  pp.91-99,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4405
3.

Conference Proceedings

Conference Proceedings
Su,B. ; Eytan,G. ; Romano,A.R.
Pub. info.: Metrology, inspection, and process control for microlithography XV.  4344  pp.695-706,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4344
4.

Conference Proceedings

Conference Proceedings
Dusa,M.V. ; Dellarochetta,S. ; Fung,A.C. ; Su,B. ; Zavecz,T.E.
Pub. info.: Optical Microlithography IX.  Part2  pp.545-554,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
5.

Conference Proceedings

Conference Proceedings
Su,B. ; Rajkumar,K.C. ; Agrawal,M.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.151-162,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
6.

Conference Proceedings

Conference Proceedings
Qian,H. ; Su,B.
Pub. info.: Laser Processing of Materials and Industrial Applications.  pp.2-5,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2888
7.

Conference Proceedings

Conference Proceedings
Dusa,M.V. ; Su,B. ; Dellarochetta,S. ; Zavecz,T.E.
Pub. info.: Optical Microlithography X.  pp.697-707,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051
8.

Conference Proceedings

Conference Proceedings
Su,B. ; Wang,Y. ; An,C. ; Fan,Y. ; Dai,J. ; Lu,D.
Pub. info.: Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China.  pp.200-204,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3175
9.

Conference Proceedings

Conference Proceedings
Wang,Y. ; Wang,Q. ; An,C. ; Su,B.
Pub. info.: Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China.  pp.210-213,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3175
10.

Conference Proceedings

Conference Proceedings
Su,B. ; Oshana,R. ; Menaker,M. ; Barak,Y. ; Shi,X.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.232-238,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998