Myers, A. F. ; Steel, E. B. ; Struck, L. M. ; Liu, H. I. ; Burns, J. A.
Pub. info.:
Electron microscopy of semiconducting materials and ULSI devices : symposium held Aprl 15-16, 1998, San Francisco, California, U. S. A.. pp.97-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Struck, L. M. ; Eng, J., Jr. ; Bent, B. E. ; Chabal, Y. J. ; Williams, G. P. ; White, A. E. ; Christman, S. ; Chaban, E. E. ; Raghavachari, K. ; Flynn, G. W. ; Radermacher, K. ; Mantl, S.
Pub. info.:
Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA. pp.395-, 1995. Pittsburgh, PA. MRS - Materials Research Society