Blank Cover Image

Measurement of Silicon Particles by Laser Surface Scanning and 365 Angle-Resolved Light Scattering

Author(s):
Huff, H.R.
Goodall, R.K.
Williams, E.
Woo, K-S.
Liu, B.Y.H.
Warner, T.
Hirleman, D.
Gildersleeve, K.
Bullis, W.M.
Seheer, B.W.
Stover, J.
6 more
Publication title:
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-5
Pub. Year:
1995
Page(from):
365
Page(to):
383
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770996 [1566770998]
Language:
English
Call no.:
E23400/952065
Type:
Conference Proceedings

Similar Items:

Goodall,R.K., Huff,H.R.

SPIE-The International Society for Optical Engineering

Nebeker,B.M., Schmehl,R., Starr,G.W., Hirleman,E.D.

SPIE-The International Society for Optical Engineering

Bullis, W.M., Huff, H.R.

Electrochemical Society

Nebeker,B.M., Starr,G.W., Hirleman,E.D.

SPIE-The International Society for Optical Engineering

Mulholland,G.W., Bryner,N., Liggett,W., Scheer,B.W., Goodall,R.K.

SPIE-The International Society for Optical Engineering

Nebeker,B.M., Starr,G.W., Hirleman,E.D.

SPIE-The International Society for Optical Engineering

Huff, H.R., Goodall, R.K., Griffiths, S.K., Nilson, R.H.

Electrochemical Society

Liu,B.Y.H.

SPIE-The International Society for Optical Engineering

Au, C., Messina, T., Goodall, R.K., Huff, H.R.

Electrochemical Society

B. Rajwa, M. Venkatapathi, K. Ragheb, P. P. Banada, E. D. Hirleman, T. Lary, J. P. Robinson

SPIE - The International Society of Optical Engineering

Ono, T., Rozgonyi, G.A., Au, C., Messina, T., Goodall, R.K., Huff, H.R.

Electrochemical Society

Mehra, R.K., Huff, M., Ravichandran, B., Williams, A.

SPIE

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12