Su, T. ; Plachy, Robin ; Taylor, P.C. ; Stone, S. ; Ganguly, G. ; Carlson, D.E.
Pub. info.:
Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A.. pp.423-428, 2002. Warrendale. Materials Research Society
Lu, W. ; Archie, C.N. ; Stone, S. ; Kang, H.H. ; Chitturi, P.R.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVIII. pp.503-514, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering