1.

Conference Proceedings
Conference Proceedings
1. Calibration strategies for overlay and registration metrology
Silver, R.M. ; Stocker, M.T. ; Attota, R. ; Bishop, M. ; Jun, J.-S.J. ; Marx, E. ; Davidson, M.P. ; Larrabee, R.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.103-120,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
2.

Conference Proceedings
Conference Proceedings
2. New NIST photomask Iinewidth standard
Potzick, J.E. ; Pedulla, J.M. ; Stocker, M.T.
Pub. info.: 22nd Annual BACUS Symposium on Photomask Technology.  Part One  pp.343-353,  2002.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4889
3.

Conference Proceedings
Conference Proceedings
3. New method to enhance overlay tool performance
Attota, R. ; Silver, R.M. ; Stocker, M.T. ; Marx, E. ; Jun, J.-S.J. ; Davidson, M.P. ; Larrabee, R.D.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.428-436,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038
4.

Conference Proceedings
Conference Proceedings
4. Updated NIST photomask linewidth standard
Potzick, J.E. ; Pedulla, J.M. ; Stocker, M.T.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVII.  1  pp.338-349,  2003.  Bellingham, WA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5038