1.

Conference Proceedings

Conference Proceedings
Cho, C.R. ; Kim, Y.S. ; Lee, J.K. ; Ko, S.W. ; Choi, D.J. ; Son, C.B. ; Stephens, A.E. ; Rozgonyi, G.A.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.350-358,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-2
2.

Conference Proceedings

Conference Proceedings
Stephens, A.E.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.774-785,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
3.

Conference Proceedings

Conference Proceedings
Stephens, A.E.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.774-785,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
4.

Conference Proceedings

Conference Proceedings
Stephens, A.E.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.908-919,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10