1.

Conference Proceedings
Conference Proceedings
1. Laser-induced generation of shaped holes by variable beam shaping [6157-19]
Stephen, A. ; Metev, S. ; Juptner, W. ; Vollertsen, F.
Pub. info.: Workshop on laser applications in Europe : 23 November 2005, Dresden, Germany.  pp.61570I-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6157
2.

Conference Proceedings
Conference Proceedings
2. Principles and applications of laser-induced liquid-phase jet-chemical etching
Stephen, A. ; Metev, S. ; Vollertsen, F.
Pub. info.: Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany.  pp.227-232,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5063
3.

Conference Proceedings
Conference Proceedings
3. 193-nm single-layer process for 150-nm technology generation and below
Amblard, G. R. ; Zandbergen, P. ; McCallum, M. ; Stephen, A. ; Byers, J. D. ; Dean, K. R. ; Meute, J. ; Nelson, C. M.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.810-827,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
4.

Conference Proceedings
Conference Proceedings
4. Antireflective coating strategies for 193-nm lithography
Stephen, A. ; Dean, K. R. ; Byers, I. D.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.1315-1322,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
5.

Conference Proceedings
Conference Proceedings
5. Selective thermo/photochemical treatment of materials: a new trend in laser microtechnology
Metev, S. ; Stephen, A. ; Schwarz, J. ; Wochnowski, C.
Pub. info.: Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan.  pp.390-395,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4830
6.

Conference Proceedings
Conference Proceedings
6. Factors influencing the properties of fluoropolymer-based resists for 157-nm lithography
Taylor, G.N. ; Xu, C.B. ; Teng, G. ; Leonard, J. ; Szmanda, C.R. ; Lawrence, W. ; Nur, S. ; Brown, K.W. ; Stephen, A.
Pub. info.: Advances in Resist Technology and Processing XIX.  Part One  pp.51-57,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4690
7.

Conference Proceedings
Conference Proceedings
7. Laser-induced chemistry: an advanced tool for micro structuring, synthesis, and modification of materials
Metev, S. ; Stephen, A. ; Schwarz, J. ; Wochnowski, C.
Pub. info.: Laser-Assisted Micro- and Nanotechnologies 2003.  pp.21-26,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5399