In, H. J. ; Arora, W. J. ; Stellman, P. ; Kumar, S. ; Yang, S. -H. ; Smith, H. I. ; Barbastathis, G.
Pub. info.:
Smart structures and materials 2005 : Smart electronics, MEMS, BioMEMS, and nanotechnology : 7-10 March 2005, San Diego, California, USA. pp.84-95, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Arora, J. W. ; Sun, W. ; Tian, K. ; Stellman, P. ; Waller, L. ; Barbastathis, G.
Pub. info.:
Optical Micro- and Nanometrology in Microsystems Technology. pp.618810-618810, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering