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13 results

Conference Proceedings

1. MULTISPECTRAL SPECTROSCOPIC ELLIPSOMETRY-A NEW TOOL FOR IN SITU SURFACE ANALYSIS

Ferrieu, F. ; Stehle, J. L. ; Bernoux, F. ; Thomas, O.

Pub. info.:	Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA. pp.403-410, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	101

Conference Proceedings

2. A NEW VARIABLE ANGLE FT-IR ELLIPSOMETER

Stehle, J. L. ; Thomas, O. T. ; Piel, J. P. ; Evrard, P. ; Lecat, J. H. ; Hammond, L. C.

Pub. info.:	Polymer based molecular composites : symposium held November 27-30, 1989, Boston, Massachusetts, U.S.A.. pp.349-354, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	171

Conference Proceedings

3. Structural Characterization of Different Insulating Films by Spectroscopic Ellipsometry and Grazing X-ray Reflectance

Boher, P. ; Stehle, J. L. ; Hennet, L.

Pub. info.:	Amorphous and crystalline insulating thin films--1996 : symposium held December 2-4, 1996, Boston, Massachusetts, U.S.A.. pp.369-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	446

Conference Proceedings

4. Surface Roughness Characterization of Au Thin Films by Spectroscopic Ellipsometry, Grazing X-ray Reflectance, Light Scattering and Scanning Tunneling Microscopy

Boher, P. ; Stehle, J. L.

Pub. info.:	Structure and evolution of surfaces : symposium held December 2-5, 1996, Boston, Massachusette, U.S.A.. pp.419-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	440

Conference Proceedings

5. Combine Spectroscopic Ellipsometry and Grazing X-ray Reflectance for Fine Characterization of Complex Epitaxial Structures

Boher, P. ; Stehle, J. L.

Pub. info.:	Diagnostic techniques for semiconductor materials processing II : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.515-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	406

Conference Proceedings

6. Single Shot Excimer Laser Annealing of Amorphous Silicon: Effect of Hydrogen on the Properties of the Polysilicon

Boher, P. ; Stehle, M. ; Godard, B. ; Stehle, J. L.

Pub. info.:	Advanced laser processing of materials - fundamentals and applications : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.. pp.417-, 1996. Pittsburgh, PA. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	397

Conference Proceedings

7. Crystallization of Si(1-y)Cy Films by Excimer Laser Annealing: Characterization of the Microstructure of the Films

Boher, P. ; Stehle, M. ; Stehle, J. L. ; Fogarassy, E. ; Grob, J. J. ; Grob, A. ; Muller, D.

Pub. info.:	Advances in microcrystalline and nanocrystalline semiconductors, 1996 : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.959-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	452

Conference Proceedings

8. Characterization of High-k Dielectrics by Combined Spectroscopic Ellipsometry (SE) and X-Ray Reflectometry (XRR)

Sun, L. ; Defranoux, C. ; Stehle, J. L. ; Boher, P. ; Evrard, P. ; Bellandi, E. ; Bender, H.

Pub. info.:	Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A.. pp.95-102, 2004. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	786

Conference Proceedings

9. Combine Spectroscopic Ellipsometry and Grazing X-ray Reflectance for Fine Characterization of Complex Epitaxial Structures

Boher, P. ; Stehle, J. L.

Pub. info.:	Surface/interface and stress effects in electronic material nanostructures : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.399-, 1996. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	405

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Conference Proceedings

10. In Situ Real-Time Spectroscopic Ellipsometry Applied to the Surface Monitoring of Semiconductors

Boher, P. ; Stehle, J. L.

Pub. info.:	Advances in microcrystalline and nanocrystalline semiconductors, 1996 : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.1025-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	452

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Author: Stehle, J. L.